Design and Fabrication of a Quartz Crystal Resonator Used in a Thickness-Monitor Unit (TECHNICAL NOTES).

نویسنده

چکیده مقاله:

This paper deals with the design and fabrication of a quartz-crystal resonator used in a thickness-monitor unit, measuring film thickness in a film-depositing system. A purpose-grown quartz crystal is cut to form the desired wafer. Two gold electrodes are deposited on both surfaces of the wafer to provide electrical contacts. The resonance frequency of the resonator, at room temperature, and the variation of the resonance frequency of the resonator with the temperature are measured. The fabricated resonator is finally used in the thickness-monitor unit of a vacuum coater.

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Monitoring Phase Transition in Polymer Using a Quartz Crystal Resonator

A monitoring device for the phase transition of polymer material with temperature variation is developed utilizing a quartz crystal resonator, and its performance has been evaluated by implementing in the melting and crystallization of polyethylene. The observation is compared with the result of DSC thermo-analysis. The experimental outcome indicates that the resonant frequency variation shows ...

متن کامل

Quartz Crystal Oscillators with Direct Resonator Heating

This paper describes a newly patented, low power, ovenized oscillator with the crystal heated directly by means of a thin film resistive heater deposited on its surface. Mounting the resonator inside an evacuated enclosure forms a miniature "thermos" bottle. The only significant path for heat loss is through the resonator mounting ribbons and posts and these, being long and thin, have quite hig...

متن کامل

About Quartz Crystal Resonator Noise: Recent Study

The first step, before investigating physical origins of noise in resonators, is to investigate correlations between external measurement parameters and the resonator noise. Tests and measurements are mainly performed on an advanced phase noise measurement system, recently set up. The resonator noise is examined as a function of the sensitivity to the drive level, the temperature operating poin...

متن کامل

Design of a new narrow band channel drop filter based on photonic crystal ring resonator

In this design an optical ring resonator are embedded between two Horizontal input and output waveguides which has 4 orbitals around the center of the resonator so that each orbital consists of 8 rods with different size in which radius of larger orbitals rods are bigger than radius of smaller orbitals rods. The analysis of simulation results showed the proposed filter has the transmission effi...

متن کامل

a contrastive analysis of concord and head parameter in english and azerbaijani

این پایان نامه به بررسی و مقایسه دو موضوع مطابقه میان فعل و فاعل (از نظر شخص و مشار) و هسته عبارت در دو زبان انگلیسی و آذربایجانی می پردازد. اول رابطه دستوری مطابقه مورد بررسی قرار می گیرد. مطابقه به این معناست که فعل مفرد به همراه فاعل مفرد و فعل جمع به همراه فاعل جمع می آید. در انگلیسی تمام افعال، بجز فعل بودن (to be) از نظر شمار با فاعلشان فقط در سوم شخص مفرد و در زمان حال مطابقت نشان میدهند...

15 صفحه اول

منابع من

با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ذخیره در منابع من قبلا به منابع من ذحیره شده

{@ msg_add @}


عنوان ژورنال

دوره 10  شماره 1

صفحات  45- 48

تاریخ انتشار 1997-02-01

با دنبال کردن یک ژورنال هنگامی که شماره جدید این ژورنال منتشر می شود به شما از طریق ایمیل اطلاع داده می شود.

میزبانی شده توسط پلتفرم ابری doprax.com

copyright © 2015-2023